|
|
|
|
Quick Reference Guide |
|
|
|
|
Standard Probe Color: |
|
Silicon Probe
|
|
|
Silicon Nitride Probe
|
|
|
Options: |
A-Aluminium reflex coating, SS-Super sharp tip,
TL-Tipless,
|
|
G-Gold reflex coating, GG-Tip and reflex side
gold coating
|
|
|
|
|
|
Application |
SPM Probe
Model
|
Brief Description
|
Cantilever
Length (µm)
|
Spring
Constant (N/m)
|
Resonance
Frequency (kHz)
|
Options |
Non-Contact/
Tapping Mode
|
ACCESS™ |
Silicon Tapping Mode Tip View Probe |
140 |
50 |
300 |
|
| ACT™ |
Silicon Tapping Mode Probe |
125
|
40
|
300
|
A, SS, TL |
| ACL™ |
Long Cantilever Tapping Mode Probe |
225 |
45 |
190 |
A,
SS, TL |
|
FORT™ |
Force Modulation Mode Probe |
225 |
3 |
60 |
A, G, GG,
SS, TL
|
|
HYDRA™ 6R-100N |
Silicon Nitride Probe, Rectangular Cantilever |
100 |
0.284 |
66 |
G, GG, TL |
|
HYDRA™ 6V-100N |
Silicon Nitride Probe, V- Shape, Narrow Cantilever
|
100 |
0.292 |
66 |
G, GG, TL |
|
HYDRA™ 6V-100W |
Silicon Nitride Probe, V- Shape, Wide Cantilever
|
100 |
0.405 |
67 |
G, GG, TL |
|
Contact Mode |
SICON™ |
Silicon Contact Mode probe |
450 |
0.2 |
12 |
A, G, GG,
SS, TL |
|
SHOCON™ |
Short Cantilever Contact Mode probe |
225 |
0.1 |
28 |
A, G, GG,
SS, TL |
|
HYDRA™ 6R-200N |
Silicon Nitride, Rectangular Cantilever |
200 |
0.035 |
17 |
G, GG, TL |
|
HYDRA™ 6V-200N |
Silicon Nitride, V- Shape, Narrow Cantilever
|
200 |
0.045 |
17 |
G, GG, TL |
|
HYDRA™ 6V-200W |
Silicon Nitride, V- Shape, Wide Cantilever
|
200 |
0.081 |
17 |
G, GG, TL |
|
Force Curve |
HYDRA™ 2R-100N |
Nitride Probe, Rectangular Cantilever |
100 |
0.011 |
21 |
G, GG, TL |
|
HYDRA™ 2R-50N |
Nitride Probe, Rectangular Cantilever |
50 |
0.084 |
77 |
G, GG, TL |
|
Electric Force Microscopy |
ANSCM™ -PA |
High Spring Constant EFM Probe |
125 |
40 |
300 |
N/A |
|
ANSCM™ -PT |
Medium Spring Constant EFM Probe |
225 |
3 |
60 |
N/A |
|
ANSCM™ -PC |
Low Spring Constant EFM Probe |
450 |
0.2 |
12 |
N/A |
|
Magnetic Force Microscopy |
MAGT™ -LM |
Low Moment MFM Probe |
225 |
3 |
60 |
N/A |
|
MAGT™ |
Medium Moment MFM Probe |
225 |
3 |
60 |
N/A |
|
MAGT™ -HM |
High Moment MFM Probe |
225 |
3 |
60 |
N/A |
|
|
|
|
|
|
|
|
High Aspect Ratio Depth Metrology
|
HART™ 0-1 |
No Tilt Compensation, 1µm spike |
125 |
40 |
300 |
A |
|
HART™ 0-2 |
No Tilt Compensation, 2µm spike |
125 |
40 |
300 |
A |
|
HART™ 0-4 |
No Tilt Compensation, 4µm spike |
125 |
40 |
300 |
A |
|
HART™ 3-1 |
3* Tilt Compensation, 1µm spike |
125 |
40 |
300 |
A |
|
HART™ 3-2 |
3* Tilt Compensation, 2µm spike |
125 |
40 |
300 |
A |
|
HART™ 3-4 |
3* Tilt Compensation, 4µm spike |
125 |
40 |
300 |
A |
|
HART™ 12-2 |
12* Tilt Compensation, 2µm Spike |
125 |
40 |
300 |
A |
|
HART™ 12-4 |
12* Tilt Compensation, 4µm spike |
125 |
40 |
300 |
A |
|
HART™ 12-6 |
12* Tilt Compensation, 6µm spike |
125 |
40 |
300 |
A |
|
Force Calibration |
FCL™ |
5 Tipless Cantilevers per chip for spring constant calibration
|
50-450 |
0.12-77 |
14-1000 |
A |
|
|
|