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TAP-TALLA |
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TAP-TALLA probes have a specially designed 65 µm tall tip for profiling high aspect ratio features and deep trenches, and have Aluminum coating on the reflex side to increase laser signal quality. Standard probes are only suitable for profiling 10-15 um features.
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Tip Specifications |
| Material: Silicon |
| Shape: Tetrahedral |
| Height (µm): 65 |
| Aspect Ratio: 1.5-3.0 |
| ROC* (nm): >15 |
| Coating: None |
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* Nominal specification; guaranteed < 30 nm |
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Cantilever Specifications
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Material: Silicon |
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Shape: Rectangular |
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Reflex Coating: Al, 30 nm ± 5 |
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TAP-TALL.pdf
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Parameter |
Nominal Value |
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Spring Constant (N/m) |
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Frequency (kHz) |
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Length (µm) |
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Width (µm) |
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Thickness (µm) |
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Ordering Information: |
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Part Number |
No. of Probes
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Pricing |
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TAP-TALLA-5 |
5 |
$750 |
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TAP-TALLA-10 |
10 |
$1,250 |
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For further information or to place an order, please contact your
local distributor or contact
Applied NanoStructures directly.
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